A novel process using self-aligned microbonding technique to make Ge/Si heterojunction PIN waveguide photodetectors for operation over 10GHz

Conference paper

C.-K. Tseng, J.-D. Tian, W.-C. Hung, K.-N. Ku, C.-W. Tseng, Y.-S. Liu, N. Na and M.-C. M. Lee

Optics & Photonics Taiwan, International Conference 2012

2012

Abstract

self-aligned microbonding technique;heterojunction;PIN;photodetectors

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Title: A novel process using self-aligned microbonding technique to make Ge/Si heterojunction PIN waveguide photodetectors for operation over 10GHz
Creators - without role: C.-K. Tseng
J.-D. Tian
W.-C. Hung
K.-N. Ku
C.-W. Tseng
Y.-S. Liu
N. Na
M.-C. M. Lee
Publication Details: Optics & Photonics Taiwan, International Conference 2012
Identifiers: 9957775914806774
Academic Unit: National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper