Abstract
In this study, a novel bi-directional out-of-plane electrothermal actuator is designed and fabricated. Unlike the bi-metal and hot-cold arm thermal actuator, this actuator can move in two directions. Since this actuator is consisted of only single layer thin film material, it can prevent from delamination. According to the static load-deflection test, this actuator can achieve bi-directional actuation with amplitude near several micros when driven at 5V. According to the vibration test, the dynamics of the actuator is influenced not only by the thermal characteristics but also by the vibration modes. Consequently, the thermal actuator still has a significant output when driven near 40 kHz. The actuator were experienced a fatigue test which shows that its resonant frequency remains unchanged after 10 9 cycles of continuous operation with driving voltage at 2.25 V pp .