Abstract
A novel Single Poly-silicon Trench Gate-type EEPROM, SPTG, featuring low voltage operation and fast programming is proposed. Using a trench floating gate instead of the stack gate structure, this cell is suitable for embedded application. The trenched floating gate (FG) combining with a deep-N-well implanted region guarantees high coupling ratio for CHEI programming and source side FN erasing operation. This cell array in a NOR-type array features fast random access capacity and 11F 2 cell size. © 2005 IEEE.