A novel spin-coated surface sol-gel technique for the preparation of ZrO 2 thin films with controllable morphology and thickness.

Conference paper

S. M. Chang and R. A. Doong

227 th ACS Annual Meeting 227 th ACS Annual Meeting

2004

Abstract

spin-coated surface;sol-gel;ZrO2 thin films

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Title: A novel spin-coated surface sol-gel technique for the preparation of ZrO 2 thin films with controllable morphology and thickness.
Creators - without role: S. M. Chang
R. A. Doong - 國立清華大學原子科學院生醫工程與環境科學系
Publication Details: 227 th ACS Annual Meeting 227 th ACS Annual Meeting
Identifiers: 9957774506406774
Academic Unit: Institute of Analytical and Environmental Sciences, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper