Abstract
This paper proposes a novel pre-etch method to determine the 〈100〉 direction on (110) silicon wafers for bulk etching. Series of circular windows were arranged in an arc of radius 48.9 mm, and bulk-etched to form hexagonal shapes for crystal orientation finding. The corners of the hexagons can be used as an alignment reference for the indication of the 〈100〉 direction on (110) silicon wafers. This innovative approach has been demonstrated experimentally to give an orientation-alignment accuracy of ± 0.03° for (110) wafers with 4-inch diameter.