Abstract
We have developed a soft lithography method to replicate polymer waveguides. In this method, the waveguides are produced by a two-step molding process where master mold is first formed on a negatively tone phototresist and subsequently transferred to a PDMS mold, and silicone rubber mold is then used as a stamp to transfer the final waveguide pattern onto a UV cure epoxy. Initial results show good pattern transferring in physical shape. The optical performance is measured based on the propagation loss. In our design, the measurement was measured at 0.26 dB/mm for 13μm and 0.24 dB/mm for 1.55μm.