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A study of solution based In-Ga-Zn-Oxide nano-particle thin film transistor devices
Conference paper

A study of solution based In-Ga-Zn-Oxide nano-particle thin film transistor devices

Ya-Hui Yang, Sidney S. Yang, Chen-Yu Kao and KAN-SEN CHOU
IDW '08 - Proceedings of the 15th International Display Workshops, Vol.2, pp.671-673
2008

Abstract

We introduce a simple and low cost method to synthesize a transparent In-Ga-Zn-Oxide (IGZO) nano-particle solution. A thin film transistor with the active layer of IGZO is fabricated by the spin coating process. The transmittance of the film exceeds 80% in visible region. The electrical properties of TFTs with a 50pm gate width and 175pm gate length displayed a linear mobility of ∼ 1.89 cm 2 A/.s, a threshold voltage is 1.5V, a drain current is 10 -4 A when gate voltage is 15V.

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