- Title
- A study on the surface property of Anti-adhesion coating for nanoimprint molds using atmosphere pressure plasma jet system
- Creators - without role
- Tai-Pang AnJe-Wei LinCheng-Kuo Sung - 國立清華大學工學院動力機械工程學系
- Publication Details
- 23nd International Microprocesses and Nanotechnology Conference (MNC 2010) 23nd International Microprocesses and Nanotechnology Conference (MNC 2010)
- Identifiers
- 9957770585406774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
A study on the surface property of Anti-adhesion coating for nanoimprint molds using atmosphere pressure plasma jet system
23nd International Microprocesses and Nanotechnology Conference (MNC 2010) 23nd International Microprocesses and Nanotechnology Conference (MNC 2010)
2010
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