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A transmission-line microwave interferometer for plasma electron density measurement
Conference paper   Peer reviewed

A transmission-line microwave interferometer for plasma electron density measurement

C.H. Chang, C.H. Hsieh, H.T. Wang, J.Y. Jeng, K.C. Leou and C. Lin
Plasma Sources Science and Technology, Vol.16(1), pp.67-71
01/02/2007

Abstract

We present both the theoretical analysis and proof-of-principle experimental results of a novel transmission-line microwave interferometer for measurements of plasma electron density. The principle of this technique is the same as conventional microwave interferometers except that the sensing microwave propagates along a transmission-line structure. For this study, the transmission-line is a circular coaxial dielectric waveguide operated at 2.4 GHz. A microwave module consisting of a microwave source and a phase detector has also been developed for detecting the phase of the microwave propagating through the transmission-line. Good agreement of phase measurements between the microwave module and a microwave network analyser has been demonstrated. The electron density measured by the interferometer is also consistent with the results from a Langmuir probe. © 2007 IOP Publishing Ltd.

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