Achieving Nitrogen-doping on Surfaces of Si and SiC Particles via Atmospheric Dielectric Barrier Discharge Treatment

Conference paper

S. I. Chuang, B. H. Cen, H. W. Chen and J. G. Duh

14th International Conference on Plasma Surface Engineering 14th International Conference on Plasma Surface Engineering

2014

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Title: Achieving Nitrogen-doping on Surfaces of Si and SiC Particles via Atmospheric Dielectric Barrier Discharge Treatment
Creators - without role: S. I. Chuang
B. H. Cen
H. W. Chen
J. G. Duh - 國立清華大學工學院材料科學工程學系
Identifiers: 9957771819206774
Academic Unit: National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: 14th International Conference on Plasma Surface Engineering 14th International Conference on Plasma Surface Engineering