- Title
- Adhesion Investigation of Low-k Films System Using 4-Point Bending Test
- Creators - without role
- W. C. WangC. C. Lee - 國立清華大學工學院動力機械工程學系J. HuangS. T. Chang
- Publication Details
- 4th International Conference on Technological Advances of Thin Films & Surface Coatings (ThinFilms 2008) 4th International Conference on Technological Advances of Thin Films & Surface Coatings (ThinFilms 2008)
- Identifiers
- 9957774876406774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Adhesion Investigation of Low-k Films System Using 4-Point Bending Test
4th International Conference on Technological Advances of Thin Films & Surface Coatings (ThinFilms 2008) 4th International Conference on Technological Advances of Thin Films & Surface Coatings (ThinFilms 2008)
2008
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