An Analytical Model for/and Measurement of Stress in Thin Film Layers of Polyimide/Cu Structures

Conference paper

D. C. Hofer and J.-H. Jou

MRS Conference MRS Conference

1991

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Title: An Analytical Model for/and Measurement of Stress in Thin Film Layers of Polyimide/Cu Structures
Creators - without role: D. C. Hofer
J.-H. Jou - 國立清華大學工學院材料科學工程學系
Publication Details: MRS Conference MRS Conference
Identifiers: 9957771387706774
Academic Unit: Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper