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An Onsite Calibration Procedure for Accurate Electrical Constants Measurement with Terahertz Time-Domain Ellipsometry
會議論文

An Onsite Calibration Procedure for Accurate Electrical Constants Measurement with Terahertz Time-Domain Ellipsometry

Chia-Ming MaiShang-Hua Yang
International Conference on Infrared, Millimeter, and Terahertz Waves (Print), 頁碼.1-2
IEEE
2024 49th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) (Perth, Australia, 01/09/2024–06/09/2024)
01/09/2024
Web of Science ID: WOS:001334520200292

摘要

Calibration Conductivity convex optimization Ellipsometry Epitaxial growth Estimation Films Guidelines Iterative methods polarimetry semiconductor epitaxy films terahertz ellipsometry Time-domain analysis Tuning
In this work, an onsite calibration method based on gradient descent is presented, designated for electrical property estimation with terahertz time-domain ellipsometry. We first discuss the relation between angular installation error of polarizers, the possible incorrectness in incident angle and their effects in estimated sheet resistivity. Based on the results, we then developed an iterative procedure, to provide guidance for tuning the components, in order to calibrate the system accordingly.

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