Abstract
Paper presents an electrostatic actuated 2-D cantilever waveguide scanner. A 2-D scanning motion has been successfully demonstrated with two fundamental resonances found at 202(V) and 536(H) Hz with corresponding FOV of 0.062 and 0.009 rad.
- Title
- An electrostatic actuated 2-D MEMS scanner for potential image display application
- Translated title
- An electrostatic actuated 2-D MEMS scanner for potential image display application
- Creators - without role
- Kebin Gu - University of WashingtonWei-Chih Wang - National Tsing Hua University
- Publication Details
- Optics InfoBase Conference Papers
- Identifiers
- 9781943580194; 9957773175406774
- Copyright
- © OSA 2016.
- Academic Unit
- National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper