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Analysis of Electro-Thermal Bent-Beam Actuators and Their Applications on Micro Grippers/Micro Optics
Conference paper

Analysis of Electro-Thermal Bent-Beam Actuators and Their Applications on Micro Grippers/Micro Optics

J. Kan, 國賓 李, H. I. Tsai, R. S. Chan and C. S. Shey
The 7th International Conference on New Actuators (Actuator 2000)
2000

Abstract

Analysis of Electro-Thermal Bent-Beam Actuators an

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