Analysis of Trace Amounts of Potential Basic Airborn Contaminants in the Semiconductor Industry

Conference paper

T. Y. Lin, H. Z. Chen and C. H. Wu

Proceedings of the Annual Meeting of the Chinese Chemical Society Proceedings of the Annual Meeting of the Chinese Chemical Society

2007

Abstract

Airborn Contaminants;Semiconductor Industry

1 Record Views

Title: Analysis of Trace Amounts of Potential Basic Airborn Contaminants in the Semiconductor Industry
Creators - without role: T. Y. Lin
H. Z. Chen
C. H. Wu - 國立清華大學原子科學院生醫工程與環境科學系
Publication Details: Proceedings of the Annual Meeting of the Chinese Chemical Society Proceedings of the Annual Meeting of the Chinese Chemical Society
Identifiers: 9957774975306774
Academic Unit: Institute of Analytical and Environmental Sciences, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper