Abstract
The finite-difference time-domain (FDTD) technique was extended to analyze the frequency response of surface acoustic wave (SAW) filters. In this method, the partial derivatives of quasi-static Maxwell's equations and the equation of motion are discretized to centered finite differences. In addition, the perfectly matched layer boundary condition was applied to reduce spurious reflections. Two structures are considered in this paper. First, the model was applied to analyze the influence of the number of electrodes on the frequency response of a SAW filter fabricated on a zinc oxide (ZnO) substrate. Then, the proposed method was further extended to analyze the frequency response of a ZnO/diamond/Si-layered SAW filter. The simulated results are in a good agreement with the existing experimental data, indicating that the FDTD method was an appropriate approach for modeling SAW devices. © 2005 IEEE.