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Analytical modeling and analyses on side instability of comb-finger
Conference paper

Analytical modeling and analyses on side instability of comb-finger

Y.-C. Chen, Ian C.-M. Chang, Max T.-K. Hou and R. Chen
Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2008) Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2008)
2008

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