- Title
- Angular Position Control of Vertical Comb-drive Micro-mirror Using Capacitive Feedback
- Creators - without role
- C. M. LeeR. Chen - 國立清華大學工學院動力機械工程學系
- Publication Details
- Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006) Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006)
- Identifiers
- 9957773609806774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Angular Position Control of Vertical Comb-drive Micro-mirror Using Capacitive Feedback
Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006) Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006)
2006
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