Application of phase locking loop control for MEMS resonant devices

Chuanwei Wang; Hung-Hsiu Yu; Chingfu Tsou; Weileun Fang

doi:10.1109/OMEMS.2005.1540130

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Conference paper

Application of phase locking loop control for MEMS resonant devices

Chuanwei Wang, Hung-Hsiu Yu, Chingfu Tsou and Weileun Fang

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, pp.165-166

2005

DOI: https://doi.org/10.1109/OMEMS.2005.1540130

Abstract

Digital signal processor (DSP)

Phase

Phase lock loop (PLL)

Resonant frequency

Torsional mirror

The phase locking control method to ensure the operating of MEMS actuators at their resonant frequency is presented. In this study, the control algorism was simulated by the MATLAB. Further, an optical scanner fabricated using the SOI wafer was employed to demonstrate the present technique. Thus the variation of the scanning angle resulted from the offset of the natural frequency of the devices can be prevented. © 2005 IEEE.

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Title: Application of phase locking loop control for MEMS resonant devices
Creators - without role: Chuanwei Wang - National Tsing Hua University
Hung-Hsiu Yu - National Tsing Hua University
Chingfu Tsou - Feng Chia University
Weileun Fang - National Tsing Hua University
Publication Details: IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, pp.165-166
Identifiers: 0780392787; 9780780392786; 9957775186406774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper

Application of phase locking loop control for MEMS resonant devices

Abstract

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