Abstract
X-ray fluorescence (XRF) is a powerful method for elemental analysis. XRF enables us nondestructive elemental analysis at ambient air pressure. In addition, simultaneous multi-elements analysis is possible by using an energy dispersive x-ray detector. We have studied the possibility that XRF is applied to elemental analysis in chemical microchips. For this purpose, chemical microchips that had an analytical region for XRF were newly designed and made. Furthermore, new XRF methods, such as grazing-exit XRF and micro- XRF, were applied. Copyright © 2005 by the Transducer Research Foundation, Inc.