Applying Multiscale PCA to Fault Detection and Classification in Semiconductor Manufacturing

Conference paper

C. Hsu, Chen-Fu Chien, P. Chen, H. Luo, S. Wang, C. Chen and H. Dai

the 3rd AEC/APC Asia Symposium the 3rd AEC/APC Asia Symposium

2005

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Title: Applying Multiscale PCA to Fault Detection and Classification in Semiconductor Manufacturing
Creators - without role: C. Hsu
Chen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系
P. Chen
H. Luo
S. Wang
C. Chen
H. Dai
Publication Details: the 3rd AEC/APC Asia Symposium the 3rd AEC/APC Asia Symposium
Identifiers: 9957776700506774
Academic Unit: Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper