- Title
- Atomic-Scale Observation on the Nucleation and Growth Mechanisms of Displacement-Activated Palladium Catalysts and Electroless Copper Plating
- Creators - without role
- Chia-Han LaiIng-Chau SongSu-Jien LinShou-Yi Chang - 國立清華大學工學院材料科學工程學系
- Publication Details
- Proceedings of the Symposium “Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors VI” of the 207th Meeting of The Electrochemical Society Proceedings of the Symposium “Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors VI” of the 207th Meeting of The Electrochemical Society
- Identifiers
- 9957777037606774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Atomic-Scale Observation on the Nucleation and Growth Mechanisms of Displacement-Activated Palladium Catalysts and Electroless Copper Plating
Proceedings of the Symposium “Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors VI” of the 207th Meeting of The Electrochemical Society Proceedings of the Symposium “Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors VI” of the 207th Meeting of The Electrochemical Society
2005
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