- Title
- Automatic Defect Detection and Classification for Color Filter and Micro-Lens Manufacturing
- Creators - without role
- Y.-J. ChenT.-H. LinK-H. ChangChen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系B. FunGB HuangR. Hung
- Publication Details
- Proceedings of 21st International Symposium on Semiconductor Manufacturing (ISSM) Proceedings of 21st International Symposium on Semiconductor Manufacturing (ISSM)
- Identifiers
- 9957773906306774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Automatic Defect Detection and Classification for Color Filter and Micro-Lens Manufacturing
Proceedings of 21st International Symposium on Semiconductor Manufacturing (ISSM) Proceedings of 21st International Symposium on Semiconductor Manufacturing (ISSM)
2013
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