Bending Beam Measurement of Thin Film Stress

Conference paper

J.-H. Jou, C.-H. Wang, C.-H. Yang and Y.-C. Cheng

Proceedings of The 4th ROK-ROC Metrology Symposium Proceedings of The 4th ROK-ROC Metrology Symposium, pp.447-452

1992

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Title: Bending Beam Measurement of Thin Film Stress
Creators - without role: J.-H. Jou - 國立清華大學工學院材料科學工程學系
C.-H. Wang
C.-H. Yang
Y.-C. Cheng
Publication Details: Proceedings of The 4th ROK-ROC Metrology Symposium Proceedings of The 4th ROK-ROC Metrology Symposium, pp.447-452
Identifiers: 9957768084106774
Academic Unit: Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper