By Varying the Distance of Ni Flux-guide for Out-of-plane Magnetic Field Sensitivity Enhancement of AMR Sensor

Conference paper

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

25/06/2023

Abstract

Magnetic sensor;AMR;anisotropic magneto-resistive;out-of-plane;flux guide;electroplating

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Title: By Varying the Distance of Ni Flux-guide for Out-of-plane Magnetic Field Sensitivity Enhancement of AMR Sensor
Creators - without role: Shih-Wei Lin
梅鳳賴
Wei-Leun Fang
Identifiers: 9957774524806774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)