CMOS MEMS Lorentz force dual-axis scanning-stage

Chih-Ming Sun; Chuan-Wei Wang; Weileun Fang

doi:10.1109/NEMS.2007.352086

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Conference paper

CMOS MEMS Lorentz force dual-axis scanning-stage

Chih-Ming Sun, Chuan-Wei Wang and Weileun Fang

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, pp.580-583

2007

DOI: https://doi.org/10.1109/NEMS.2007.352086

Abstract

This study presents a novel dual-axis CMOS MEMS scanning stage driven using the Lorentz force. The device has been successfully implemented using the TSMC 2P4M process. The current routing achieved by three metal layers enables the independent driving for each axis. The measurement results show that the device has resonant frequencies of 1.36KHz and 2.26KHz respectively for each axis. © 2007 IEEE.

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Title: CMOS MEMS Lorentz force dual-axis scanning-stage
Creators - without role: Chih-Ming Sun - National Tsing Hua University
Chuan-Wei Wang - MEMS Institute , National Tsmg Hua University
Weileun Fang - National Tsing Hua University
Publication Details: Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, pp.580-583
Identifiers: 1424406102; 9781424406104; 9957773092306774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper

CMOS MEMS Lorentz force dual-axis scanning-stage

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