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CMOS Process Compatible Visible-Blind Ultraviolet Phototransistors
Conference paper

CMOS Process Compatible Visible-Blind Ultraviolet Phototransistors

Yu-Ting Wang, Wan-Ting Ke, Tsung-Ting Wu and Ming-Chang M. Lee
International Conference on Optical MEMS and Nanophotonics, Vol.2018-July, 8454602
09/2018

Abstract

CMOS process Ultraviolet Phototransistors UV sensors visible blind filter Hardware and Architecture Electrical and Electronic Engineering Electronic Optical and Magnetic Materials
We propose an interdigitated Si lateral bipolar phototransistor integrated with an Al-SiO 2 -Al (metal-dielectric-metal structure) visible-blind ultraviolet Fabry-Pérot bandpass filter. The maximum optical transmittance is 0.56 at the wavelength 332 nm, and the FWHM of transmission is 78.6 nm. And we successfully demonstrated suppression of visible light with the highest responsivity 9.78 × 10 -2 (A/W) at wavelength of 350 nm.

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