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CMOS-compatible wavelength-selective infrared sensors
Conference paper

CMOS-compatible wavelength-selective infrared sensors

Chia-Chien Hsieh, Tsung-Ting Wu and Ming-Chang M. Lee
Optics InfoBase Conference Papers, Vol.Part F43-CLEO_AT 2017
2017

Abstract

Electronic Optical and Magnetic Materials Mechanics of Materials
We propose wavelength-selective infrared sensors made by multiple metallic resonant waveguide gratings integrated on a germanium photodetector array. The detective spectrum can cover from 1.25μm to 1.55μm with the FWHM less than 25nm.

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