Abstract
This study employed the composite-film to fabricate CNT-polymer microactuators. The actuator is driven using electrostatic, thermal, and optical approaches. The subsequent measurements show that micro-cantilever actuators can be electrically driven at very low pull in voltage compared with existing MEMS elements. Bimorph effect from composite cantilever is also tested. The experimental results show that the output displacement of the actuator by electrostatic approach was 560 μm at a 50V driving voltage. Moreover, the actuator also moved 560 μm at only a 160°C temperature variation, and 325 μm at a 450 μA driving current. The material also has the potential to apply for optical actuator. ©2007 IEEE.