- Title
- Can MEMS take advantage of advances in semiconductor lithography?
- Creators - without role
- 本堅 林
- Publication Details
- Proceedings of the 23rd IEEE International Conference on MEMS
- Identifiers
- 9957777325106774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Can MEMS take advantage of advances in semiconductor lithography?
Proceedings of the 23rd IEEE International Conference on MEMS
2010
Related links
Metrics
1 Record Views