Abstract
A bi-axial scanning micromirror is typically used for scanning-type projectors to receive and deflect laser beams to form two-dimensional images pixel by pixel. The operation requires the micromirror to be driven at its resonant frequency which can vary due to fabrication tolerance and temperature drift, necessitating the use of a closed-loop oscillator circuit. This study reports capacitive driving and sensing of a micromirror fabricated by using the silicon-on-insulator (SOI) technology. The micromirror is driven at 1.2 kHz and 22.9 kHz along the two axes to achieve WVGA imaging resolution. © 2014 IEEE.