- Title
- Capacitive gap-aspect-ratio enhancement using advanced CMOS process for CMOS-MEMS resonators
- Creators - without role
- C.-S. LiS.-S. Li - 國立清華大學工學院動力機械工程學系
- Identifiers
- 9957769699406774
- Academic Unit
- Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Capacitive gap-aspect-ratio enhancement using advanced CMOS process for CMOS-MEMS resonators
2011
Metrics
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