- Title
- Capacity Planning for Cluster Tools of Wafer Fabrication Plant
- Creators - without role
- J. C. Chen - 國立清華大學工學院工業工程與工程管理學系C. W. ChenK. H. ChenC. H. Lin
- Identifiers
- 9957773789406774
- Academic Unit
- Department of Industrial Engineering and Engineering Management (Professional Master Program), National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- 3rd International Conference on Advanced Design and Manufacture 3rd International Conference on Advanced Design and Manufacture
Conference paper
Capacity Planning for Cluster Tools of Wafer Fabrication Plant
3rd International Conference on Advanced Design and Manufacture 3rd International Conference on Advanced Design and Manufacture
2010
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