Abstract
This study presents a novel process to batch-fabricated carbon nanotube devices on flexible substrate. In short, the pre-made carbon nanotube (CNT) arrays on Si-wafer are firstly blended with polymer and are then transferred onto a polymer film using chemical-vapor-deposition (CVD) of parylene. This yields CNT arrays on flexible substrates. Electrical measurements reveal that nanotube arrays behave as ohmic conductors and their current-voltage profile is linear. Nanotubes embedded in polymer are then exposed by O 2 plasma etching and field emission measurements indicate that exposed nanotube arrays exhibit a low threshold field emission at 0.58 V/μm and field enhancement factor appears to be 5500. Thus, the present devices offer a novel route to flexible FED applcation. ©2008 IEEE.