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Characterization and Current Modeling of Stacked high-κ Metal-Insulator-Metal Capacitors
Conference paper

Characterization and Current Modeling of Stacked high-κ Metal-Insulator-Metal Capacitors

Gui-Sheng Chao, Wei-Hua Chen, Kuan-Ju Chen, Chrong-Jung Lin and Ya-Chin King
2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings
2023
DOI: https://doi.org/10.1109/VLSI-TSA/VLSI-DAT57221.2023.10134387

Abstract

Artificial Intelligence Computer Networks and Communications Computer Science Applications Hardware and Architecture Information Systems Electrical and Electronic Engineering
A new leakage current model for explaining the asymmetry characteristics of Metal-Insulator-Metal capacitor is proposed in this study. To improve the capacitance density while minimizing its leakage current level, new layering designs of high-κ dielectric materials are investigated with verification on the proposed model.

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