Characterization of WNx Coatings Under Different Substrate Bias Voltage Prepared by DC Magnetron Sputtering

Conference paper

Y.Z. Tsai, C.H. Lin and J.G. Duh

34th International Conference and Metallurgical Coatings and Thin Films 34th International Conference and Metallurgical Coatings and Thin Films

2007

Metrics

1 Record Views

Title: Characterization of WNx Coatings Under Different Substrate Bias Voltage Prepared by DC Magnetron Sputtering
Creators - without role: Y.Z. Tsai
C.H. Lin
J.G. Duh - 國立清華大學工學院材料科學工程學系
Publication Details: 34th International Conference and Metallurgical Coatings and Thin Films 34th International Conference and Metallurgical Coatings and Thin Films
Identifiers: 9957771616306774
Academic Unit: National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper