Characterization of fluid flows in 101 NM extended-nano spaces

We report measurements of mass flow rate for fluid flows in 10 nm channels in a transitional region between single molecules and continuum. We realized fabrication of square-shaped 10 nm channel with 10 nm roughness for the first time. The flow rate in the fabricated channels at sizes of 70-100 nm was successfully measured. This work provides a new research tool and greatly contributes to fields of nanofluidics and molecular fluid science.