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Characterization of the interfacial electronic properties of oxide films on GaAs fabricated by in-situ molecular beam epitaxy
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Characterization of the interfacial electronic properties of oxide films on GaAs fabricated by in-situ molecular beam epitaxy

J.S. Hwang, W.Y. Chou, G.S. Chang, S.L. Tyan, M. Hong, J.P. Mannaerts and J. Kwo
Proceedings of the IEEE 24th International Symposium on Compound Semiconductors, ISCS 1997, pp.249-253
1997

Abstract

Electrical and Electronic Engineering Electronic Optical and Magnetic Materials
We have used room temperature photoreflectance spectroscopy to study interfacial electronic properties of various oxide-GaAs heterostructures. The samples, air-, Al 2 O-, Ga 2 O x -, and Ga 2 O 3 (Gd 2 O 3 )-GaAs, were fabricated by in-situ molecular beam epitaxy. Built-in electric fields are 48, 44, and 35 kV/cm for air-, Al 2 O 3 -, and Ga 2 O x -GaAs samples, respectively, corresponding to the interfacial state density (D it ) of 2.4, 2.2, and 1.9×10 11 cm -2 eV -1 , respectively. For the Ga 3 O 3 (Gd 2 O 3 )-GaAs sample, the built-in electric field is negligibly small, indicating a very low interfacial stare density. Estimated by the low field limit criterion, D it is less than 1×10 11 cm -2 eV -1 . Our results are consistent with the previous data obtained using capacitance-voltage measurements in quasi-static/high frequency modes.
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