- Title
- Charge trapping and current conduction mechanisms of advanced metal-oxide-semiconductor capacitors with LaxTay dual-doped HfON dielectrics
- Creators - without role
- Chin-Lung Cheng - National Formosa UniversityJeng-Haur Horng - National Formosa UniversityKuei-Shu Chang-Liao - Department of Engineering and System Science , National Tsing Hua UniversityJin-Tsong Jeng - National Formosa UniversityHung-Yung Tsai - National Formosa University
- Publication Details
- 2009 International Semiconductor Device Research Symposium, ISDRS '09, 5378236
- Identifiers
- 9781424460304; 9957774292206774
- Academic Unit
- Institute of Nuclear Engineering and Science, College of Nuclear Science, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Charge trapping and current conduction mechanisms of advanced metal-oxide-semiconductor capacitors with LaxTay dual-doped HfON dielectrics
2009 International Semiconductor Device Research Symposium, ISDRS '09, 5378236
2009
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