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Charge trapping and current conduction mechanisms of advanced metal-oxide-semiconductor capacitors with LaxTay dual-doped HfON dielectrics
Conference paper

Charge trapping and current conduction mechanisms of advanced metal-oxide-semiconductor capacitors with LaxTay dual-doped HfON dielectrics

Chin-Lung Cheng, Jeng-Haur Horng, Kuei-Shu Chang-Liao, Jin-Tsong Jeng and Hung-Yung Tsai
2009 International Semiconductor Device Research Symposium, ISDRS '09, 5378236
2009

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