- Title
- Combined Adaptive and Sliding Control of Vertical Comb-Drive Micromirrors
- Creators - without role
- T.-C. TsaiR. Chen - 國立清華大學工學院動力機械工程學系H.-T. Hsieh
- Identifiers
- 9957774374806774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- 2006 奈米工程暨微系統技術研討會 2006 奈米工程暨微系統技術研討會
Conference paper
Combined Adaptive and Sliding Control of Vertical Comb-Drive Micromirrors
2006 奈米工程暨微系統技術研討會 2006 奈米工程暨微系統技術研討會
2006
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