- Title
- Composition gradient in thick TiSiCN nanocomposites with plasma enhanced magnetron sputtering for mechanical strengthening
- Creators - without role
- Y.C. ChanH.W. ChenR.H. WeiJ.G. Duh - 國立清華大學工學院材料科學工程學系J.W. Lee
- Identifiers
- 9957768304906774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- TACT 2011 International Thin Films Conference TACT 2011 International Thin Films Conference
Conference paper
Composition gradient in thick TiSiCN nanocomposites with plasma enhanced magnetron sputtering for mechanical strengthening
TACT 2011 International Thin Films Conference TACT 2011 International Thin Films Conference
2011
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