Abstract
This study has demonstrated the idea of concreting the aligned CNT-films using the chemical vapor deposited (CVD) polymer film, so as to form the "CNT-polymer" composite-film. The mechanical properties of the aligned CNT-film and the "CNT-polymer" composite-film are characterized. The experimental results show that the elastic modulus and hardness of composite-film is much greater than those of the aligned CNT-films. This study also established a process to fabricate suspended MEMS structures using this composite-film. Thus the "CNT-polymer" composite-film could be a potential material for MEMS. © 2005 IEEE.