Construct a GOEE Framework of Equipment Performance Management and a Study for Promoting Tool Productivity in Semiconductor Manufacturing

Conference paper

3rd Modeling and Analysis of Semiconductor Manufacturing Conference 3rd Modeling and Analysis of Semiconductor Manufacturing Conference, pp.5-12

2005

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Title: Construct a GOEE Framework of Equipment Performance Management and a Study for Promoting Tool Productivity in Semiconductor Manufacturing
Creators - without role: H. Chen
Chen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系
Publication Details: 3rd Modeling and Analysis of Semiconductor Manufacturing Conference 3rd Modeling and Analysis of Semiconductor Manufacturing Conference, pp.5-12
Identifiers: 9957770767706774
Academic Unit: Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper