- Title
- Constructing a Dynamic Adjusted Proportional-Integral Controller for Yield Enhancement of Overlay Errors
- Creators - without role
- 嘉裕 許暎仁 陳宏鍇 王昶成 周
- Publication Details
- 2010工業工程與管理學術研討會
- Grant note
- 國科會
- Identifiers
- 9957766545006774
- Academic Unit
- Executive Cross-Discipline Master Program for Intelligent Manufacturing, Office of Academic Affairs, National Tsing Hua University
- Resource Type
- Conference paper
Conference paper
Constructing a Dynamic Adjusted Proportional-Integral Controller for Yield Enhancement of Overlay Errors
2010工業工程與管理學術研討會
2010
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