Constructing a Dynamic Adjusted Proportional-Integral Controller for Yield Enhancement of Overlay Errors

Conference paper

C.-Y. Hsu, Chen-Fu Chien, Y.-J. Chen, H.-K. Wang and G. Chou

2010 Chinese Institute of Industrial Engineers 2010 Chinese Institute of Industrial Engineers

2010

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Title: Constructing a Dynamic Adjusted Proportional-Integral Controller for Yield Enhancement of Overlay Errors
Creators - without role: C.-Y. Hsu
Chen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系
Y.-J. Chen
H.-K. Wang
G. Chou
Identifiers: 9957774060306774
Academic Unit: Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: 2010 Chinese Institute of Industrial Engineers 2010 Chinese Institute of Industrial Engineers