- Title
- Constructing a FDC Framework with Statistical Embedded Models for Semiconductor Fabrications
- Creators - without role
- P. ChenChen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系H. LuoH. DaiS. Wang
- Publication Details
- 11th International Conference on Industrial Engineering and Engineering Management 11th International Conference on Industrial Engineering and Engineering Management
- Identifiers
- 9957769364106774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Constructing a FDC Framework with Statistical Embedded Models for Semiconductor Fabrications
11th International Conference on Industrial Engineering and Engineering Management 11th International Conference on Industrial Engineering and Engineering Management
2005
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