- Title
- Constructing a Metrology Sampling Framework for In-Line Inspection in Semiconductor Fabrication
- Creators - without role
- Y. TanChen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系C. Kuo
- Identifiers
- 9957766083406774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- 11th International Conference on Industrial Engineering and Engineering Management 11th International Conference on Industrial Engineering and Engineering Management
Conference paper
Constructing a Metrology Sampling Framework for In-Line Inspection in Semiconductor Fabrication
11th International Conference on Industrial Engineering and Engineering Management 11th International Conference on Industrial Engineering and Engineering Management
2005
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