Constructing a Metrology Sampling Framework for In-Line Inspection in Semiconductor Fabrication and its Decision Analysis

Conference paper

Y. Tan, Chen-Fu Chien, C. Hsu, C. Wu and C. Kuo

Chinese Institute of Industrial Engineers National Conference Chinese Institute of Industrial Engineers National Conference

2005

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Title: Constructing a Metrology Sampling Framework for In-Line Inspection in Semiconductor Fabrication and its Decision Analysis
Creators - without role: Y. Tan
Chen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系
C. Hsu
C. Wu
C. Kuo
Publication Details: Chinese Institute of Industrial Engineers National Conference Chinese Institute of Industrial Engineers National Conference
Identifiers: 9957775560406774
Academic Unit: Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper