Construction of Semiconductor Overall Fab Performance Index Hierarchy Structure and Index Control

Conference paper

Chinese Institute of Industrial Engineers Conference (CIIE) Chinese Institute of Industrial Engineers Conference (CIIE)

2009

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Title: Construction of Semiconductor Overall Fab Performance Index Hierarchy Structure and Index Control
Creators - without role: K. Lin
Chen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系
Publication Details: Chinese Institute of Industrial Engineers Conference (CIIE) Chinese Institute of Industrial Engineers Conference (CIIE)
Identifiers: 9957775519706774
Academic Unit: Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper